| Sign In | Join Free | My rc363.com |
|
Place of Origin : Guangdong, China
warranty : 1 Year
Price : $1,000
MOQ : 1
machine type : Multi-Arc Ion Coating System Ionic Thin Film Coate
Brand Name : LONROY
voltage : 220 V
power(w) : /
dimension(l*w*h) : 1900*800*1900mm
weight (kg) : 100



Item | Specification |
1. Vacuum chamber | Ф500×H420mm, 304 stainless steel, front door opening structure; Chamber heating temperature: room temperature ~ 350±1℃; |
2. Vacuum system | A high vacuum system composed of a composite molecular pump + direct-coupled rotary vane pump + high vacuum valve, and a digital display composite vacuum gauge; |
3. Vacuum limit | Better than 6.0×10-5Pa (no load, after baking and degassing); |
4. Leak rate | Equipment pressure boost rate ≤0.8Pa/h;Equipment pressure maintenance: 12 hours after stopping the pump, the vacuum is ≤10Pa; |
5. Pumping speed | (No load) Pumped from the atmosphere to 5.0×10-3Pa≤15min; |
6. Substrate table size | Φ150mm, 3 rotation stations; |
7. Substrate stage rotation | Substrate rotation: 0~20 rpm; |
8. Sputtering target | DN100 new magnetic filter multi-arc target 2 sets |
9. Pulse bias power supply | -1000V, 1 set; |
11. Control method | PLC+touch screen human-machine interface semi-automatic control system; |
12. Alarm and protection | Alarm and implement corresponding protection measures for abnormal conditions such as water shortage, overcurrent and overvoltage, circuit breakage, etc. in pumps and electrodes; complete logic program interlock protection system; |
13. Land occupation | (Host) L1900×W800×H1900(mm). |

|
|
High-Vacuum Multi-Arc Ion Coating System Ionic Thin Film Coater Ionized Plating Layer Tester Cathodic Arc Deposition Device Images |